Methods for bonding substrates

ABSTRACT

Methods for fabricating and refurbishing an assembly are disclosed herein. The method begins by applying an adhesive layer onto a first substrate. A second substrate is placed onto the adhesive layer, thereby securing the two substrates together, the adhesive layer bounding at least one side of a channel that extends laterally between the substrates to an exterior of the assembly. And, the substrates and the adhesive layer are subjected to a bonding procedure and allowing outgassing of volatiles from the adhesive layer to escape from between the substrates through the channel, wherein the substrates bonded by the adhesive layer form a component for a semiconductor vacuum processing chamber.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a division of U.S. patent application Ser. No.14/015,650, filed Aug. 30, 2013, which claims benefit of U.S.Provisional Application Ser. No. 61/703,220, filed Sep. 19, 2012, and,both of which are incorporated by reference in their entireties.

BACKGROUND OF THE INVENTION

Field of the Invention

Embodiments of the present invention generally relate to a method forbonding substrates and components suitable for use in a semiconductorprocessing chamber fabricated by the same, using a segmented bonddesign.

Description of the Related Art

In substrate processing applications, many chamber parts and componentsare fabricated using two or more parts, or substrates, bonded together.Examples of such components includes electrostatic pucks bonded totemperature control supports, showerheads bonded to gas distributionplates, and heaters bonded to chamber lids, among others.

FIG. 1 is an example of a conventional chamber part comprisingsubstrates bonded together illustrated as an electrostatic chuckassembly 100. The electrostatic chuck assembly 100 includes anelectrostatic puck 102 coupled to a temperature control base 106 by anadhesive layer 104. The electrostatic puck 102 includes a substratesupport surface 120 on which a wafer (not shown) is electrostaticallyretained during vacuum processing. The substrate support surface 120generally includes a plurality of backside gas delivery holes (notshown) to provide a backside gas, such as helium, to improve heattransfer between the substrate and the electrostatic puck 102.

The adhesive layer 104 is generally a continuous monolithic layer thatcovers the entire mating surfaces of the electrostatic puck 102 and thetemperature control base 106. The adhesive layer 104 may include anumber of holes formed therethrough, for example, for accommodating liftpins, RF power delivery rod, helium passages and the like. Onlyexemplary lift pin holes 110 formed in the adhesive layer 104 areillustrated in FIG. 1 for simplicity. The lift pin holes 110 align withlift pin holes 116 formed through the electrostatic puck 102 and liftpin holes 118 formed through the temperature control base 106.

Referring to the partial sectional view of the electrostatic chuckassembly 100 depicted in FIG. 2, the electrostatic puck 102 generallyincludes a chucking electrode 202 embedded in a dielectric body 204. Thedielectric body 204 is typically fabricated from ceramic materials, suchas aluminum nitride and/or oxide. The chucking electrode 202 may be ametal mesh or other suitable conductor. Chucking of a substrate (i.e.,wafer) placed on the substrate support surface 120 is achieved throughCoulombic or Johnsen-Rahbeck effect by applying a DC voltage to thechucking electrode 202 through the RF power delivery rod (not shown)passing through the temperature control base 106 and adhesive layer 104.

The temperature control base 106 generally includes a thermallyconductive body 216, typically fabricated from aluminum, stainless steelor other material with good thermal conductivity. At least onetemperature control feature 218 may be formed in and/or coupled to thethermally conductive body 216. The temperature control feature 218 maybe a heater or chiller, and in the embodiment illustrated in FIG. 2, thetemperature control feature 218 is shown as inner and outer channels220, 222 through which separately controlled heat transfer fluid may becirculated to provide separate temperature control zones across thesubstrate support surface 120 of the electrostatic puck 102.

During fabrication and/or use of the electrostatic chuck assembly 100,volatiles out-gassed by the adhesive layer 104, particularly duringcuring, may become trapped between the electrostatic puck 102 and thetemperature control base 106. The trapped volatile gases may delaminatethe adhesive layer 104 from one or both of the electrostatic puck 102and the temperature control base 106, such as shown by a void 210illustrated in FIG. 2. The void 210 increases thermal impedance betweenthe electrostatic puck 102 and the temperature control base 106 whichcan result in out-of-spec temperature uniformity on the substrate (e.g.,wafer) processed, which in turn leads to costly loss of yield andproductivity. Further, in applications which utilize moisture-curedsilicones as the adhesive layer 104, fully curing the adhesive layer 104requires adequate presence and availability of moisture locally at thebond site. Adequate moisture availability becomes difficult orimpossible when the adhesive layer is very thin relative to the diameterof the adhesive layer resulting in incomplete curing of the adhesive.This further aggravates the likelihood of volatile out-gassing duringuse and subsequent delamination and/or deteriorating performance of theelectrostatic chuck assembly 100.

As the electrostatic chuck assembly 100 must be periodicallyrefurbished, the high aspect ratio of the adhesive layer 104 makes itdifficult to thoroughly expose the interior portions of the adhesivelayer 104 to solvents needed to efficiently weaken the bond between theelectrostatic puck 102 and the temperature control base 106. If theadhesive layer 104 cannot be sufficiently weakened, the electrostaticpuck 102 and/or the temperature control base 106 may become damaged ifthe electrostatic puck 102 and the temperature control base 106 areforcefully pried apart. In extreme instances, the temperature controlbase 106 may need to be machined away to free the electrostatic puck102. Thus, refurbishment of conventional electrostatic chuck assemblies100 may be labor intensive, have high scrap rates and be undesirablyexpensive.

The above mentioned problems are not unique to electrostatic chuckassemblies, but present to some extent in just about all semiconductorchamber components which utilize a contiguous layer of adhesive to bondtwo substrates. This problem also exists in display and solar vacuumprocessing applications as well where the bonding surface areas can bemuch larger.

Therefore, a need exists for improved methods for bonding substrates,components fabricated by the same, along with improved methods forrefurbishing said components.

SUMMARY OF THE INVENTION

In one embodiment, a method for fabricating an assembly is disclosedherein. The method begins by applying an adhesive layer onto a firstsubstrate. A second substrate is placed onto the adhesive layer, therebysecuring the two substrates together, the adhesive layer bounding atleast one side of a channel that extends laterally between thesubstrates to an exterior of the assembly. And, the substrates and theadhesive layer are subjected to a bonding procedure and allowingoutgassing of volatiles from the adhesive layer to escape from betweenthe substrates through the channel, wherein the substrates bonded by theadhesive layer form a component for a semiconductor vacuum processingchamber.

In another embodiment, a method of refurbishing an assembly having twosubstrates joined together by an adhesive layer, wherein at least oneside of the adhesive layer bounds a channel that laterally extendsbetween the substrates to an exterior of the assembly is disclosedherein. The method begins by introducing a bond weakening agent to aninterior region of the adhesive layer through the channel. Thesubstrates are separated. The first substrate is refurbished and arefurbished assembly is formed using the refurbished first substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentinvention can be understood in detail, a more particular description ofthe invention, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this invention and are therefore not to beconsidered limiting of its scope, for the invention may admit to otherequally effective embodiments.

FIG. 1 is an exploded, top perspective view of a conventionalelectrostatic chuck assembly.

FIG. 2 is a partial cross-sectional view of the electrostatic chuckassembly of FIG. 1.

FIG. 3 is an exploded, top perspective view of one embodiment of anelectrostatic chuck assembly.

FIG. 3A is a partial cross-sectional view of the electrostatic chuckassembly of FIG. 3.

FIG. 3B is a partial cross-sectional view of the electrostatic chuckassembly of FIG. 3 having a seal ring.

FIG. 3C is a cross-sectional view of the electrostatic chuck assemblytaken along section line 3C-3C of FIG. 3B illustrating a channel formedin an adhesive layer.

FIGS. 4-12 are cross-sectional views of alternative embodiments ofchannels formed in an adhesive layer.

FIG. 13 is an exploded sectional view of a showerhead assembly inaccordance with one embodiment of the invention.

FIG. 14 is a sectional view of the showerhead assembly of FIG. 13illustrating an exemplary configuration of channels formed in anadhesive layer.

FIG. 15 is an exploded top perspective view of one embodiment of anassembly comprising at least two substrates secured by an adhesive layerhaving at least one channel formed therein.

FIG. 16 is a partial sectional view of an optional configuration of thechannel of FIG. 15.

FIG. 17 is an exploded top perspective view of another embodiment of anassembly comprising at least two substrates having at least one channelsuitable for venting an adhesive layer securing the two substrates.

FIG. 18 is a flow diagram of one embodiment of a method for fabricatingan assembly comprising at least two substrates secured by an adhesivelayer.

FIG. 19 is a flow diagram of one embodiment of a method for refurbishingan assembly comprising at least two substrates secured by an adhesivelayer.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements of one embodiment may bebeneficially incorporated in other embodiments.

DETAILED DESCRIPTION

Embodiments of the invention generally provide a method for bondingsubstrates, assemblies fabricated by the same, along with improvedmethods for refurbishing said assemblies. Embodiments of the inventiondescribed herein take advantage of at least one channel partiallybounded by an adhesive utilized to join two substrates. In certainembodiments of the invention, the channel is defined between adjacentsegments of an adhesive layer bonding the substrates together. Thechannel is open to an exterior of the substrate assembly, thus providinga vent path for volatile gases outgassed from the adhesive layer toescape from between the substrates, either during curing or use of theassembly. Advantageously, the vent path enhances better curing of theadhesive layer. The vent path also prevents gas pockets from formingbetween the substrates which could adversely affect the temperatureprofile across the surface of the substrates. By improving reliabilityof the ability to control the temperature profile across the surface ofthe substrates, out-of-spec temperature uniformity on the wafer, hotspots, etc., which may lead to costly loss of yield and productivity ofprocessed wafers are avoided.

Certain embodiments of the invention include bonding two substrates,such as an electrostatic puck to a temperature control base, with anadhesive layer that is segmented into a plurality of segments, asopposed to a conventional, continuous monolithic adhesive layer. Achannel formed between adjacent segments, permits the substrates to beeasily debonded for refurbishment and/or service. Furthermore, thechannel between adjacent segments additionally permits outgassing ofvolatiles from between the two substrates, because the channel extendsto an exterior of the bonded substrates.

A first embodiment of the invention will illustratively be described asan electrostatic chuck assembly having two substrates joined by anadhesive layer, and having at least one channel that provides a path forvolatiles outgassing from the adhesive layer to escape to an exterior ofthe assembly. A second embodiment of the invention will illustrativelybe described as a showerhead assembly, while a third embodiment of theinvention will generally describe an assembly of at least twosubstrates. Other embodiments of the invention described herein includemethods of fabricating and refurbishing the above referenced assemblies.Still other embodiments of the invention do not necessarily require achannel that provides a path for volatiles, but rather include amethodology for ensuring sufficient adhesion between the substrates sothat flatness of the surface upon which the wafer rests remains within adefined flatness tolerance.

FIG. 3 is an exploded perspective view of one embodiment of an assemblycomprising substrates bonded together illustrated as an electrostaticchuck assembly 300. FIG. 3A is a partial cross-sectional view of theelectrostatic chuck assembly 300 of FIG. 3. Referring to both FIG. 3 andFIG. 3A, the electrostatic chuck assembly 300 includes an electrostaticpuck 102 coupled to a temperature control base 106 by an adhesive layer302. The electrostatic puck 102 includes a substrate support surface 120on which a substrate (not shown) is electrostatically retained duringvacuum processing. Although an exemplary electrostatic puck 102 andtemperature control base 106 have been described above, electrostaticpucks and temperature control bases having alternative configurationsmay alternatively be utilized.

The adhesive layer 302 bonds the mating surfaces of the electrostaticpuck 102 and the temperature control base 106. The adhesive layer 302may include a number of holes formed therethrough, for example, lift pinholes 110 and/or other holes for backside gas, power delivery,thermocouples and the like. The adhesive layer 302 is comprised of oneor more segments 304. In some embodiments, one or more of the segments304 may be unconnected from the other segments 304 of the adhesive layer302. Alternatively, one or more of the segments 304 may be connected toone or more of other segments 304 forming the adhesive layer 302.

The adhesive layer 302 is formed from an adhesive material having goodthermal conductivity, for example materials having a thermalconductivity greater than about 0.3 Watt per meter degrees Kelvin(W/mK). Suitable materials for the adhesive layer 302 include, but arenot limited to, acrylic-based adhesives, neoprene-based adhesives,silicone adhesives, epoxies, PSA (Pressure Sensitive Adhesives),thermoplastic adhesives, and thermoset adhesives, or a combination ofthese, among others. Examples of suitable adhesive materials includeTHERMATTACH® T412 adhesive, available from PARKER-CHOMERICS. In oneembodiment, the adhesive layer 302 has a thickness of between about 10to about 300 μm or greater. The adhesive layer 302 may also have a lapshear adhesion of at least about 40 pounds per square inch (PSI) and atensile strength of about 40 PSI at 25 degrees Celsius. In one example,the peel strength between the electrostatic puck 102 and the temperaturecontrol base 106 is between about 2 pounds (about 0.91 kilogram) perlinear inch and about 14 pounds (about 6.35 kilograms) per linear inchusing an acrylic adhesive layer 302.

The bond material comprising the adhesive layer 302 may be in the formof an adhesive sheet (which can be preformed then laid down on eitherthe electrostatic puck 102 or the temperature control base 106) or afluid (e.g., a paste, gel or liquid that can be dispensed, screenprinted or otherwise dispensed in a desired pattern). In one embodiment,the adhesive layer 302 is in the form of a plurality of precut segments304 having a desired shape which are carefully laid up flat on one ofthe clean substrates (e.g., the electrostatic puck 102 or thetemperature control base 106) and squeegeed to remove most air bubbles,a release liner is then removed from the unadhered surface of theadhesive layer and the other substrate (e.g., the other of theelectrostatic puck 102 or the temperature control base 106) is preciselyaligned on the adhesive layer 302, and subsequently subjected to abonding procedure.

The adhesive layer 302 is vented to an exterior diameter 308 (e.g.,outer diameter of the adhesive layer 302, the electrostatic puck 102 orthe temperature control base 106) of the electrostatic chuck assembly100 through one or more channels 310 to provide a path through whichvolatiles outgassing from an interior region 306, such as the center ofthe electrostatic chuck assembly 100, may escape from between theelectrostatic puck 102 and the temperature control base 106. Thechannels 310 may be in the plane or parallel to a plane of the adhesivelayer 302, for example extending laterally between the electrostaticpuck 102 and temperature control base 106. At least one of the channels310 terminates at an outlet 316 formed on the exterior diameter 308 ofthe electrostatic chuck assembly 300. In the embodiment depicted in FIG.3, at least one of the channels 310 is defined in the adhesive layer 302between separated adhesive segments 304 which define the plane of theadhesive layer 302. For example in the embodiment depicted in FIG. 4,four channels 310 are illustrated, each channel 310 defined betweenfacing edges 312, 314 of adjacent segments 304, with each channel 310having an outlet 316 on the exterior diameter 308 of the electrostaticchuck assembly 300. Although four channels 310 arranged perpendicularlyin the form of a cross are illustrated in FIG. 4, the channels 310 maybe straight, circular, or have another configuration.

The outlet 316 of the channel 310 provides a vent path that allowsvolatiles outgassed by the adhesive layer 302, particularly duringcuring, to escape from between the electrostatic puck 102 and thetemperature control base 106. Providing a vent path to the exteriordiameter 308 of the electrostatic chuck assembly 300 via the channel 310substantially prevents volatile gases from becoming trapped, therebysignificantly reducing the chance of the adhesive layer 302 delaminatingfrom one or both of the electrostatic puck 102 and the temperaturecontrol base 106. Additionally, since the vent path provided by thechannel 310 substantially eliminates void formation, the thermalimpedance between the electrostatic puck 102 and the temperature controlbase 106 remains uniform, which in turn leads to increased yield andproductivity during processing of a workpiece of the chuck assembly 300.Further, in applications which utilize moisture-cured silicones as theadhesive layer 302, fully curing the adhesive layer 302 is enhanced bythe delivery of moisture locally to bond sites within the interiorregion 306 of the adhesive layer 302 via the channel 310, even when thebond plane is thin and of high aspect ratio, e.g., in electrostaticchuck assemblies where the adhesive layer is thin (e.g., about 1-500urn) and the diameter of the substrates is large (e.g., greater thanabout 150 mm).

The channel 310 also provides a path for infiltration of a bondweakening agent, such as solvents, utilized to weaken the adhesive layer302, thereby allowing the substrates (e.g., the electrostatic puck 102and temperature control base 106) to be more easily separated forrefurbishment. Thus, the channels 310 allow a faster and more costefficient refurbishment, with a significant reduction in damage to theelectrostatic puck 102 and temperature control base 106, as compared toconventional methodology employed to remove monolithic adhesive layersin conventional electrostatic chuck assemblies.

The channels 310 generally create an open area in the adhesive layer302. The open area of the adhesive layer 302 may be as much as 50percent of the adhesive layer 302. In one embodiment, the channels 310(and other perforations of the adhesive layer 302) define an open areaof less than about 1% to about 50% percent of the adhesive layer 302.

The channels 310 may also be partially defined in one or both of theelectrostatic puck 102 and temperature control base 106. The channels310 may be narrow, having a width of less than about 10 mm, as topromote heat transfer uniformity. As the channel 310 runs in contactwith the adhesive layer 302 along substantially all of its length, theportion of the channel 310 directly exposed and bounded by the adhesivelayer 302 is exponentially greater than the circumference of the channel310.

Another advantage of having a discontinuous adhesive layer 302 is areduction in stress on the adhesive layer 302. As the electrostatic puck102 and the temperature control base 106 may have different coefficientsof thermal expansion, the stress generated when these substrates areheated is absorbed by the adhesive layer 302. Thus, the number, positionand width of the channels 310 may be selected to maintain stress in theadhesive layer 302 at levels which do not detrimentally affect the lifeof the adhesive material, cause delamination or disrupt the flatness ofthe substrate support surface 120 of the electrostatic puck 102.Generally, more segments 304 and channels 310 allow greater stresses tobe accommodated by the adhesive layer 302.

In alternative embodiments wherein the channels 310 do not terminate atthe exterior diameter 308 of the electrostatic chuck assembly 300, thegap provided between segments 304, across the channels 310, may beutilized for managing the stress within the adhesive layer 302. The gapin the adhesive layer 302 minimizes the effects from a miss-match in thethermal expansion between the electrostatic puck 102 and the temperaturecontrol base 106 which could adversely affect the flatness of thesubstrate support surface 120 of the electrostatic puck 102.

FIG. 3B is a partial cross-sectional view of the electrostatic chuckassembly 300 of FIG. 3 having a seal ring 360. Referring additionally tothe cross-sectional view of the electrostatic chuck assembly 300 takenalong section line 3C-3C of FIG. 3B, the seal ring 360, such as ano-ring or gasket, may be disposed at the bond-line between theelectrostatic puck 102 and temperature control base 106. Additionally,the seal ring 360 may be retained in a seal retaining gland 362 formedin the temperature control base 106. In such embodiments, the venting ofthe interior region 306, for the out gassing species from the adhesivelayer 302, may utilize a passage 364 formed through the temperaturecontrol base 106 coupling one of more of the channels 310 to theexterior diameter 308 of the temperature control base 106.

The passage 364 has an opening 366 formed on an upper surface 370 of thetemperature control base 106 that faces the electrostatic puck 102. Thepassage 364 has an opening 368 formed on the exterior diameter 308 ofthe electrostatic chuck assembly 300 between the upper surface 370 andlower surface 372 of the temperature control base 106. The passage 364may be formed by two connecting passages, for example, two intersectingdrill holes, or by a single hole formed at an acute angle relative to acenterline of the temperature control base 106. The spacing of theopening 368 away from the substrate support surface 120 of theelectrostatic puck 102 allows any volatiles outgassed during processingto enter the interior volume of the processing chamber downstream of thesubstrate being processed thereby reducing potential contamination ofthe substrate.

Alternatively, the passage 364 may be in the form of a groove (notshown) provided laterally across the seal retaining gland 362 thatallows the channel 310 between the adhesive segments 304 to leak aroundthe seal ring 360 to the exterior diameter 308 of the electrostaticchuck assembly 300.

FIGS. 5-12 are cross-sectional views of alternative embodiments of anadhesive layer having at least one channel with an outlet exposed to anexterior of an electrostatic chuck assembly which may be substituted forthe adhesive layer 302 described above. Although the adhesive layer isshown disposed on the temperature control base, the adhesive layer mayalternatively be disposed on the electrostatic puck prior to adherenceto the temperature control base.

Referring now to the sectional view of FIG. 5, an electrostatic chuckassembly 500 is shown with the electrostatic puck 102 removed to revealthe underlying adhesive layer 502 disposed on the temperature controlbase 106. The adhesive layer 502 may be fabricated in a similar fashionas the adhesive layer 302 described above.

The adhesive layer 502 includes a plurality of segments 504 arranged ina pie-shaped configuration such that the channels 510 defined betweenthe segments 504 pass through an interior region 306 of the adhesivelayer 502. At least one channel 510 has an outlet 316 disposed on anexterior diameter 308 of the electrostatic chuck assembly 500 to providea path for gases to efficiently escape, or off gas, from the adhesivelayer 502. The gases may even successfully off gas for embodimentswherein the adhesive layer 502 exceeds 450 mm in diameter. The channels510 pass through a centerline of the electrostatic chuck assembly 500,which promote uniform and thorough curing of the adhesive layer 502. Thechannels 510 efficiently remove volatile gases. Additionally, thechannels 510 facilitating efficient delivery of a bond weakening agentto the interior region 306 of the adhesive layer 502 for rapid andsubstantially trouble-free debonding of the electrostatic puck 102 fromthe temperature control base 106 during refurbishment.

Referring now to the sectional view of FIG. 6, an electrostatic chuckassembly 600 has the electrostatic puck 102 removed (e.g., not shown inFIG. 6) to reveal the underlying adhesive layer 602 disposed on thetemperature control base 106. The adhesive layer 602 may be fabricatedin a fashion similar to the adhesive layers described above and utilizedto secure the puck 102 the base 106.

The adhesive layer 602 includes a plurality of segments 604 arranged ina pie-shaped configuration such that the channels 610 defined betweenthe segments 604 pass through an interior region 306 of the adhesivelayer 602. At least one channel 610 has an outlet 316 disposed on anexterior diameter 308 of the electrostatic chuck assembly 600. Thechannel 610 provides a path for gases to efficiently escape, or offgases, from the adhesive layer 602. The gases may even successfully offgas in embodiments wherein the adhesive layer 602 exceeds a diameter ofabout 450 mm. In one embodiment, the channels 610 may pass through acenterline of the electrostatic chuck assembly 600.

In one embodiment, the segments 604 comprising the adhesive layer 602may be grouped into at least one outer segment 622 and at least oneinner segment 624. The outer segment 622 is disposed radially outward ofthe inner segment 624. The outer segment 622 and inner segment 624 areseparated by an interior channel 620. The interior channel 620 may becoupled to at least one of the channels 610 terminating at the outlet316 so that the portions of the segments 604 exposed to the channels 620may be vented. Additional interior channels 620 (shown in phantom) maybe utilized to create concentric groups of inner segments 624 (alsoshown in phantom).

In one embodiment, the outer segments 622 and the inner segments 624 maybe fabricated from a different adhesive material. For example, theadhesive material comprising the outer segments 622 may have a higherheat transfer coefficient than the adhesive material comprising theinner segments 624. The electrostatic puck 102 may be cooledpreferentially at the center to compensate for processes that heat thecenter of a wafer disposed on the electrostatic chuck assembly 600faster than the edges of the wafer. Alternatively, the adhesive materialcomprising the outer segments 622 may have a lower heat transfercoefficient than the adhesive material comprising the inner segments624. The electrostatic puck 102 may be cooled preferentially at the edgerelative to the center of the electrostatic puck 102. In anotherembodiment having concentric groups of inner segments 624, the inner andouter groups of inner segments 624 may be fabricated from differentadhesive materials to provide three or more zones with different heattransfer rates between the electrostatic puck 102 and temperaturecontrol base 106.

In yet another embodiment, the adhesive material comprising the outersegments 622 may have a greater peel and/or tensile strength relative tothe adhesive material comprising the inner segments 624. Alternativelythe adhesive material comprising the outer segments 622 may have a lowerpeel and/or tensile strength relative to the adhesive materialcomprising the inner segments 624. In this manner, the strength of thematerial bond comprising the inner segments 624 relative to the outersegments 622 may be selected to prevent bowing and/or maintain flatnessof the substrate support surface 120 after thermal loading due todifferences in the electrostatic puck 102 and the temperature controlbase 106 coefficient of thermal expansion. The inner and outer groups ofinner segments 624 may also be fabricated from a different adhesivematerial to provide three or more zones, or concentric zones, withdifferent adhesive strength coupling the electrostatic puck 102 to thetemperature control base 106. The use of different strength for theadhesive materials may prevent undesired changes to the flatness of thesubstrate support surface 120 and reduce and/or eliminate the need torefurbish, or flatten, the substrate support surface 120 by chemicalmechanical polishing. Additionally, in embodiments wherein the channels610 do not terminate at the exterior diameter 308 of the electrostaticchuck assembly 600, using adhesive material having different strengthson the different segments 604 may manage stress within the adhesivelayer 602 and promote flatness of the substrate support surface 120.

As illustrated in FIG. 6, the open area of the adhesive layer 602 may beselected by the width, number and location of the channels 610, 620 tocreate a more open area in one location relative to another. Thedifferent open areas may be utilized to tailor the strength and/or heattransfer characteristics across the adhesive layer 602. For example, thechannels 610, 620 may be configured to provide a greater percentage ofopen area in the interior region 306 relative to an outer region 630proximate the exterior diameter 308 of the electrostatic chuck assembly600. The greater percentage of open area at the interior region 306 willresult in less heat transfer between the electrostatic puck 102 andtemperature control base 106 at the center of the electrostatic puck 102relative the perimeter of the electrostatic puck 102. The difference inthe heat transfer rate for the interior region 306 and the perimeter ofthe electrostatic puck 102 may compensate for processes that heat theperimeter of the wafer faster than the interior region 306 of the wafer.Conversely, the channels 610, 620 may be configured to provide a smallerpercentage of open area in the interior region 306 relative an outerregion 630 of the adhesive layer 602. The smaller percentage of openarea in the interior region 306 allows more heat transfer through theinterior region 306, or center, of the electrostatic puck 102 relativethe outer region of the electrostatic puck 102.

Referring now to the sectional view of FIG. 7, an electrostatic chuckassembly 700 has the electrostatic puck 102 removed (e.g., not shown inFIG. 7) to reveal the underlying adhesive layer 702 disposed on thetemperature control base 106. The adhesive layer 702 may be fabricatedin a fashion similar to the adhesive layers described above and utilizedto secure the puck 102 the base 106. More particularly, theelectrostatic chuck assembly 700 is substantially identical to theelectrostatic chuck assembly 600 described above, except channels 710,having a first end terminating at outlets 316, are connected at a secondend to an inner channel 720.

The adhesive layer 702 includes a plurality of segments 704 arranged ina truncated pie-shaped configuration. Each channel 710 may terminate oneend at the inner channel 720 and another end at an outlet 316 disposedon an exterior diameter 308 of the electrostatic chuck assembly 700. Thechannel 710 provides a path for gases to efficiently escape from theadhesive layer 702.

The segments 704, comprising the adhesive layer 702, may be grouped intoat least one outer segment 622 and at least one inner segment 624. Theouter segment 622 is disposed radially outward of the inner segment 624.The outer segment 622 and inner segment 624 are separated by theinterior channel 720.

The inner segment 624 may be fabricated from an adhesive materialdifferent than that of the outer segment 622. As discussed above withreference to the inner and outer segments 624, 622, the adhesivematerial comprising the outer segments 622 may have a higher or lowerheat transfer coefficient than the adhesive material comprising theinner segments 624. In this manner the electrostatic puck 102 may bethermally regulated with an edge to center gradient. In anotherembodiment, the adhesive material comprising the outer segments 622 mayhave a greater or lower peel and/or tensile strength relative to theadhesive material comprising the inner segments 624. For example, theadhesive material comprising the outer segments 622 may be selected froman acrylic-based adhesive, a neoprene-based adhesive, a siliconeadhesive or the like which provides a lower peel and/or tensile strengthrelative to an adhesive material comprising the inner segments 624, suchas an epoxy. In this manner, the strength of the material comprising theinner segments 624 relative the outer segments 622 may be selected toprevent bowing and/or maintain flatness of the substrate support surface120 of the electrostatic puck 102 after thermal loading due tomismatches in the coefficient of thermal expansion between theelectrostatic puck 102 and temperature control base 106. In analternative embodiment, the adhesive material comprising the outersegments 622 may be selected to provide a higher peel and/or tensilestrength relative to an adhesive material comprising the inner segments624. In embodiments having concentric groups of inner segments 624 (notshown), the inner and outer groups of inner segments 624 may also befabricated from a different adhesive material to provide three or morezones. For example, the inner segments 624 zones, coupling theelectrostatic puck 102 to the temperature control base 106, may beconcentric and of different adhesive strength and/or coefficients ofthermal conductivity.

Referring now to FIG. 8, an electrostatic chuck assembly 800 has theelectrostatic puck 102 removed (e.g., not shown in FIG. 8) to reveal theunderlying adhesive layer 802 disposed on the temperature control base106. The adhesive layer 802 may be fabricated in a similar fashion asthe adhesive layers described above and utilized to secure the puck 102the base 106. More particularly, the electrostatic chuck assembly 800 issubstantially identical to the electrostatic chuck assemblies describedabove, except the adhesive layer 802 may include at least one channel810 that terminates at an outlet 316. A single channel 810 forms aspiral pattern extending inward toward the interior region 306. Thesingle spiraling channel 810 in the adhesive layer 802 may additionallyprovide a single segment 804. The spiraling channel 810 facilitatesventing the interior region 306 of the adhesive layer 802.

Referring now to FIG. 9, an electrostatic chuck assembly 900 has theelectrostatic puck 102 removed (e.g., not shown in FIG. 9) to reveal theunderlying adhesive layer 902 disposed on the temperature control base106. The adhesive layer 902 may be fabricated in a similar fashion asthe adhesive layers described above and utilized to secure the puck 102the base 106.

As shown in FIG. 9, the adhesive layer 902 includes at least one channel910 with two opposing ends wherein each end terminates at a separateoutlet 316. In one embodiment, a plurality of channels 910 may be formedin rows. The rows of channels 910 may be linear, curved, sinusoidal orother shape. In one embodiment, the rows of channels 910 may be linearand parallel defining the segments 904 therebetween. Optionally, theadhesive layer 902 may include secondary channels 920 (shown in phantom)that are disposed at a non-zero angle relative to the channels 910thereby forming a grid of segments 904. At least one end of thesecondary channels 920 terminates at an outlet 316. In one embodiment,the secondary channels 920 may be disposed at about 90 degrees relativeto the channels 910.

Referring now to the sectional view of FIG. 10, an electrostatic chuckassembly 1000 has the electrostatic puck 102 removed (e.g., not shown inFIG. 10) to reveal the underlying adhesive layer 1002 disposed on thetemperature control base 106. The adhesive layer 1002 may be similarlyfabricated as the adhesive layers described above and utilized to securethe puck 102 the base 106. More particularly, the adhesive layer 1002 ofthe electrostatic chuck assembly 1000, may include a plurality ofdiscreet segments 1004. One or more of the discreet segments 1004 mayoptionally be connected by a web 1006 (shown in phantom) of adhesive.Channels 1010, defined between the discreet segments 1004, are exposedto an exterior diameter 308 through outlets 316. The channels 1010 ventan interior region 306 of the adhesive layer 1002 through the outlets316.

The number, size, position and density of the discreet segments 1004 areselected to control the open area of the adhesive layer 1002. The openarea, and percentage of open area between regions of the electrostaticchuck assembly 1000 may be selected to control the heat transfer rateand/or adhesion strength profile across the electrostatic chuck assembly1000, as discussed above.

For example, the segments 1004 defining the adhesive layer 1002 may begrouped into an outer segment group 1020, an intermediate segment group1022 and an inner segment group 1024. Each segment group 1020, 1022,1024 may include one or more segments 1004 which may be separated bychannel 1010. The outer segment group 1020 may be disposed radiallyoutward of the intermediate segment group 1022. The intermediate segmentgroup 1022 may be disposed radially outward of the inner segment group1024.

One or more of the segments 1004, comprising each segment groups 1020,1022, 1024, and/or the segment groups 1020, 1022, 1024, may befabricated from different adhesive materials. As discussed above withreference to the inner and outer segments 624, 622, of FIG. 6, theadhesive material comprising one or more segments 1004 in a particularsegment group may have a higher or lower heat transfer coefficientand/or strength than the adhesive material comprising the other segments1004 within that group. For example, the adhesive material comprisingthe outer segments group 1020 may be selected from an acrylic-basedadhesive, a neoprene-based adhesive, a silicone adhesive or the likewhich provides a lower peel and/or tensile strength relative to anadhesive material comprising the inner segment group 1024, such as anepoxy. In this manner, the electrostatic puck 102 may be thermallyregulated with an azimuthal gradient, which may be selected to corrector compensate for other azimuthal non-uniformities within the processingchamber. The strength of the materials for the inner segments group1024, relative the outer segment group 1020, may be selected to preventbowing and/or maintain flatness of the substrate support surface 120 dueto induces stress in the adhesive layer 1002 from thermal loading. Thethermal loading may occur from mismatches in the coefficient of thermalexpansion between the electrostatic puck 102 and temperature controlbase 106.

Referring now to FIG. 11, an electrostatic chuck assembly 1100 has theelectrostatic puck 102 removed (e.g., not shown in FIG. 11) to revealthe underlying adhesive layer 1102 disposed on the temperature controlbase 106. The adhesive layer 1102 may be similarly fabricated as theadhesive layers described above and utilized to secure the puck 102 thebase 106. More particularly, the electrostatic chuck assembly 1100 issubstantially identical to the electrostatic chuck assemblies describedabove, except the adhesive layer 1102 may include a plurality ofsegments 1104 separated by at least one channel 1110 that terminates atan outlet 316. Additionally, the plurality of segments 1104 may includeat least one primary segment 1122 that circumscribes at least onesecondary segment 1120. The secondary segment 1120 may be touching thecircumscribing primary segment 1122, or the segments 1120, 1122 may beseparated by a secondary channel 1124. The secondary channel 1124 may beisolated from the channel 1110, or alternatively connected thereto by aconnecting channel 1126 (shown in phantom). The vent path provided bythe channels 1110 facilitates escape of gases from between theelectrostatic puck 102 and temperature control base 106. Additionally,the channels 1110 may facilitate the introduction of a bond weakeningagent to the interior region 306 of the adhesive layer 1102. Theadhesive materials used in fabricating the segments 1120, 1122 may besimilar or may be different. The selection of the adhesive materials maybe used to control the heat transfer profile, manage stresses within theadhesive layer 1102 and/or control the flatness for the substratesupport surface 120.

Referring now to FIG. 12, an electrostatic chuck assembly 1200 has theelectrostatic puck 102 removed (e.g., not shown in FIG. 12) to revealthe underlying adhesive layer 1202 disposed on the temperature controlbase 106. The adhesive layer 1202 may be similarly fabricated as theadhesive layers described above and utilized to secure the puck 102 thebase 106. The electrostatic chuck assembly 1200 is substantiallyidentical to the electrostatic chuck assembly 1100 described above. Moreparticularly, the adhesive layer 1202 includes a plurality of segments1204 separated by at least one channel 1210 that terminates at an outlet316. The plurality of segments 1204 include at least one primary segment1222 that circumscribes at least one secondary segment 1220, exceptwherein a secondary channel 1224 separating the segments 1220, 1222 isconnected by a connecting channel 1226 to the channel 1210. The ventpath provided by the channels 1210 facilitates escape of gases frombetween the electrostatic puck 102 and temperature control base 106.Additionally, the vent path facilitates the introduction of a bondweakening agent to the interior region 306 of the adhesive layer 1202.The adhesive materials used in fabricating the segments 1220, 1222 maybe the similar or different. The selection of the adhesive materials maybe used to control the heat transfer profile, manage stresses within theadhesive layer 1102 and/or control the flatness for the substratesupport surface 120.

FIG. 13 is an exploded sectional view of a showerhead assembly 1300comprising substrates bonded together. FIG. 14 is a cross-sectional viewof the showerhead assembly 1300 taken along section line 14-14 of FIG.13. Referring to both FIG. 13 and FIG. 14, the showerhead assembly 1300includes a showerhead 1352 coupled by an adhesive layer 1302 to a gasdistribution plate 1354. The adhesive layer 1302 includes a plurality ofholes 1308 that align with holes 1312, formed in the showerhead 1352 andholes 1314 formed in the gas distribution plate 1354. The holes 1312,1324 allow gas to pass through the showerhead assembly 1300 during waferprocessing.

The adhesive layer 1302 bonds the mating surfaces of the showerhead 1352and the gas distribution plate 1354. The adhesive layer 1302 iscomprised of one or more segments 1304. In embodiments having two ormore segments 1304, one or more of the segments 1304 may be separatedfrom the other segments 1304 by a channel 1310. Alternatively, one ormore of the segments 1304 may be continuous with one or more of othersegments 1304 forming the adhesive layer 1302. The adhesive layer 1302may be formed from an adhesive material to control the heat transferprofile, manage stresses within the adhesive layer 1302 and/or controlthe flatness for the gas distribution plate 1354 of the showerheadassembly 1300.

The adhesive layer 1302 is vented to an exterior diameter 1358 (e.g.,outer diameter) of the showerhead assembly 1300 through one or morechannels 1310. Volatiles from an interior region 1306 of the adhesivelayer 1302, between the showerhead 1352 and the gas distribution plate1354, may outgas from the center of the showerhead assembly 1300 throughthe one or more channels 1310. At least one of the channels 1310terminates at an outlet 1316 formed on the exterior diameter 1358 of theshowerhead assembly 1300. In one embodiment, at least one of thechannels 1310 is defined in the adhesive layer 1302 between separatedadhesive segments 1304 which define the plane of the adhesive layer1302. Although six channels 1310 arranged about 60 degrees areillustrated in FIG. 13, the channels 1310 may have other geometry,density, width, number, spacing or other configuration. The adhesivelayer 1302, channels 1310 and/or segments 1304 may additionally beconfigured in any of the manners discussed above with reference to theadhesive layer utilized in the electrostatic puck to realize theadvantages described above.

The channel 1310 also provides a path to the interior region of theadhesive layer 1302 for a bond weakening agent to weaken the adhesivelayer 1302. The bond weakening agent allows the substrates (e.g., theshowerhead 1352 and gas distribution plate 1354) to be more easilyseparated for refurbishment. Thus, the channels 1310 allow a faster andmore cost efficient refurbishment of the showerhead assembly 1300, witha significant reduction in damage to the showerhead 1352 and gasdistribution plate 1354, as compared to conventional methodologyemployed to remove monolithic adhesive layers in conventional showerheadassemblies.

FIG. 15 is an exploded top perspective view of an assembly 1500. Theassembly 1500 includes at least two substrates 1502, 1506 secured by anadhesive layer 1504. The assembly 1500 additionally includes at leastone channel 1510 configured to vent the adhesive layer 1504 to anexterior 1550 of the assembly 1500. The channel 1510 provides a path forvolatiles outgassing from the adhesive layer 1504 to escape from betweenthe substrates 1502, 1506.

The assembly 1500 may be a system or component designed for use undervacuum conditions, in an ultraclean (e.g., cleanroom) environment, in aplasma processing system or other system to mitigate contamination fromoutgassing and/or risk of delamination due to gas outgassing from theadhesive layer between substrates 1502, 1506. The assembly 1500 may alsobe a component where chemical weakening of the adhesive layer 1504 maybe desired for later separation of the substrates 1502, 1506.

The assembly 1500 may be a component for a semiconductor vacuumprocessing chamber having at least a portion of the exterior surface1550 of the assembly 1500 exposed to a plasma environment. In oneembodiment, the assembly 1500 is a lid assembly, wherein the firstsubstrate 1502 is a first portion of the lid and the second substrate1506 is a second portion of the lid, such as a heater. In anotherembodiment, the assembly 1500 is a substrate support pedestal assembly,wherein the first substrate 1502 is a first portion of a substratesupport pedestal and the second substrate 1506 is a second portion ofthe substrate support pedestal, such as a heater. In another embodiment,the assembly 1500 is a liner assembly for a chamber wall or substratesupport, wherein the first substrate 1502 is a first portion of a linerand the second substrate 1506 is a second portion of the liner. In yetanother embodiment, the assembly 1500 may be a two-part ring, such as acover ring, deposition ring, focus ring and the like, wherein the firstsubstrate 1502 is a first portion of the ring and the second substrate1506 is a second portion of the ring. In still another embodiment, theassembly 1500 is two-part shield, wherein the first substrate 1502 is afirst portion of the shield and the second substrate 1506 is a secondportion of the shield.

The adhesive layer 1504 may be fabricated and configured as describedabove with reference to FIGS. 3-12. One or more channels 1510 formedthrough the adhesive layer 1504 have at least one outlet 1512 on theexterior 1550 of the assembly 1500 to facilitate outgassing of theadhesive layer 1504. Additionally, the one or more channels 1510, formedthrough the adhesive layer 1504, may be used to introduce a bondweakening agent to an interior region 1514 of the adhesive layer 1504for separating the bonded substrates 1502, 1506.

The channel 1510 formed through the adhesive layer 1504 may additionallyinclude a portion 1602 formed in at least one of the substrates 1502,1506, as shown in FIG. 16. The formation of the portion 1602 of thechannel 1510 in at least one of the substrates 1502, 1506 substantiallyensures that the channel 1510 will not close in the event that sidewalls1606 of the adhesive layer 1504 bounding the channel 1510 bulge asindicated by phantom line 1604 due to stresses induced in the adhesivelayer 1504, mis-positioning of the segments 1508 or for other reasons.

FIG. 17 is an exploded top perspective view of an assembly 1700. Theassembly 1700 includes at least two substrates 1702, 1706 secured by anadhesive layer 1704. The assembly 1700 also includes at least onechannel 1710 formed in at least one of the substrates 1702, 1706. Thechannel 1710 is configured to vent the adhesive layer 1704, securing thetwo substrates 1702, 1706, to an exterior 1750 of the assembly 1700. Atleast one side of the channel 1710 bounds the adhesive layer 1704. Thechannel 1710 provides a path for volatiles outgassing from the adhesivelayer 1704 to escape from between the substrates 1702, 1706. Theassembly 1700 may be a system or component as described above withreference to the assembly 1500.

The adhesive layer 1704 may be fabricated and configured as describedabove with reference to FIGS. 3-16, and may optionally include ventingchannels (i.e., channels 310, 510, 610, 710, 810, 910, 1010, 1210, 1310,1510 not shown in FIG. 17) formed in the adhesive layer 1704. The one ormore channels 1710 formed in at least one of the substrates 1702, 1706is bounded on at least one side by the adhesive layer 1704 and has atleast one outlet 1712 on the exterior 1750 of the assembly 1700 tofacilitate outgassing of the adhesive layer 1704. Additionally, thechannels 1710 may be used to introduce a bond weakening agent to aninterior region 1714 of the adhesive layer 1704 for separating thebonded substrates 1702, 1706.

FIG. 18 is a block diagram of a method 1800 for fabricating an assembly.The assembly may include at least two substrates secured by an adhesivelayer, such as described above with reference to FIGS. 3-17. The method1800 generally includes applying an adhesive layer onto a firstsubstrate. Placing a second substrate onto the adhesive layer forattaching the two substrates together. The adhesive layer has at leastone side of a channel that extends laterally between the substrates toan exterior of the assembly. Subjecting the substrates and the adhesivelayer to a bonding procedure, and outgassing volatiles from the adhesivelayer between the substrates through the channel.

In one embodiment, the method 1800 begins at step 1802 by cleaning themating surfaces of two substrates which are to be assembled to form anassembly, such as a chamber component. Cleaning may be accomplished bywiping the mating surfaces with solvent, deionized water or othersuitable cleaner. The mating surfaces of two substrates may optionallybe roughened.

At step 1804, an adhesive layer is applied to at least one of the matingsurfaces. The adhesive layer may be in the form of a preformed adhesivesheet (which can be laid down) or a fluid (e.g., paste that can bedispensed, screen printed, masked or otherwise applied in a desiredpattern). In one embodiment, the adhesive layer comprises a plurality ofprecut shapes that are secured to at least one of the mating surfaces ofthe substrate. The adhesive layer may be squeegeed to substantiallyremove air bubbles and to ensure the adhesive layer is substantiallyflat against the mating surface. The adhesive layer is applied to atleast one of the mating surfaces in a manner that defines a side of oneor more channels that open to an exterior of the chamber component. Thechannels are configured to allow volatiles outgassing from the adhesivelayer to escape from between the substrates and/or to allow introductionof a bond weakening agent into an interior region of the adhesive layerduring debonding should it be desirable to later separate thesubstrates.

At step 1806, any release liner disposed on the adhesive layer isremoved and the other substrate is precisely aligned and placed on theadhesive layer, thereby securing the two substrates together.

At step 1808, the substrates and the adhesive layer are subjected to abonding procedure suitable for the type of adhesive being utilized. Foran exemplary acrylic-based adhesive layer used in the assembly, thebonding procedure may include baking in an autoclave for a predefinedperiod of time. The bonding procedure may be performed under vacuum toenhance outgassing of volatiles from the adhesive layer. The channelsbounding the adhesive layer allows for faster and more thorough curingof the adhesive material comprising the adhesive layer, along withallowing any volatiles outgassed from the adhesive layer to escape frombetween the substrates.

At step 1810, the bonded assembly is cleaned, tested and prepared forshipment.

FIG. 19 is a block diagram of a method 1900 for refurbishing anassembly. The assembly, such as an assembly described above withreference to FIGS. 3-17, may include at least two substrates secured byan adhesive layer. At least one side of the adhesive layer bounds achannel that laterally extends between the substrates to an exterior ofthe assembly. The method 1900 generally includes introducing a bondweakening agent to an interior region of the adhesive layer through thechannel, separating the substrates, refurbishing the first substrate,and forming a refurbished assembly using the refurbished firstsubstrate.

At step 1902, a bond formed by the adhesive layer is weakened byintroducing a bond weakening agent to an interior region of the adhesivelayer via a channel having at least one side bounded by the adhesivelayer. The channel extends from an exterior of the assembly into theinterior region of the adhesive layer. The bond weakening agent may be asolvent or other material suitable for weakening the bonds of aparticular adhesive material comprising the adhesive layer. Introductionof the bond weakening agent to the interior region of the adhesive layermay be accomplished by the bond weakening agent flowing through thechannel to the interior region. Since the channel has at least one sidebounded by the adhesive layer, the bond weakening agent is in contactacross a large region of the adhesive layer. Additionally, thesubstrates may be heated to enhance the chemical attack of the adhesivelayer by the bond weakening agent.

At step 1904, the substrates are separated. Separating the substratesmay optionally include prying the substrates apart.

At step 1906, at least one of the substrates is resurfaced. For example,a surface pitted by exposure to a plasma environment may have a portionof the surface removed to leave a substantially non-pitted surface. Theportion of the surface may be removed by machining, grinding, beadblasting, abrasive blasting, chemical mechanical polishing, lapping orother suitable technique.

In the case that the substrate being resurfaced is a ceramicelectrostatic puck, a new layer of ceramic material may be disposed onthe surface after resurfacing. The new layer of ceramic material may bespray deposited or otherwise bonded to the substrate. The new layer ofceramic material deposited on the substrate is then worked to addsurface features, such as mesas, surface gas distribution channels andthe like.

In the case that the substrate being resurfaced is a gas distributionplate, resurfacing substantially restores the surface exposed to theplasma environment to a surface roughness equal to that of a new gasdistribution plate. Restoration of the surface may include materialremoval and polishing processes. For example, the surface may bepolished to a surface roughness of about 20 Ra or less.

In other embodiments, one substrate may be replaced with a new ordifferent substrate instead of resurfacing one of the separatedsubstrates.

At step 1908, the resurfaced (or replacement) substrate is cleaned andprepared for joining with a second substrate. The second substrate maybe a reclaimed substrate, such as the substrate from which theresurfaced substrate was previously bonded to at step 1902, or a newsubstrate. Cleaning the mating surfaces of two substrates may beaccomplished by wiping the mating surfaces with solvent, deionized wateror other suitable cleaner. The mating surfaces of two substrates mayoptionally be roughened prior to joining.

At step 1910, the resurfaced substrate joined to a second substrate byan adhesive layer. The substrate joining technique may be the method1800 described above or other suitable joining technique.

In summation, a method for bonding substrates and assemblies fabricatedby the same, along with improved methods for refurbishing saidassemblies have been disclosed. The assemblies take advantage of anadhesive layer with at least one channel bounded by the adhesiveutilized to join the two substrates. The channel in the adhesiveimproves fabrication, performance and refurbishment of the assemblies.The channel provides a vent path for volatile gases to outgas from theadhesive layer and escape from between the substrates, either duringcuring or use of the assembly. Advantageously, the vent path enhancesbetter curing of the adhesive layer, improves the temperature profilecontrol, allows stress management within the assembly for enhancedflatness control, and allows for more efficient and less destructivedebonding/separating of the substrates. The invention described hereinis particularly useful for semiconductor vacuum processing chambercomponents (i.e., assemblies), such as electrostatic chuck assembliesand showerhead assemblies among others. However, the invention is alsouseful for other applications wherein the ability to vent an adhesivelayer securing two or more substrates is desirable.

While the foregoing is directed to embodiments of the present invention,other and further embodiments of the invention may be devised withoutdeparting from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

What is claimed is:
 1. A method of fabricating an assembly, comprising:applying an adhesive layer onto a first substrate; placing a secondsubstrate onto the adhesive layer, thereby securing the two substratestogether, the adhesive layer bounding at least one side of a channelthat extends laterally between the substrates to an exterior of theassembly; and subjecting the substrates and the adhesive layer to abonding procedure and allowing outgassing of volatiles from the adhesivelayer to escape from between the substrates through the channel, whereinthe substrates bonded by the adhesive layer form a component for asemiconductor vacuum processing chamber.
 2. The method of claim 1,wherein the adhesive layer has a plurality of segments.
 3. The method ofclaim 2, further comprising: fabricating has at least two of theplurality of segments from different adhesive materials.
 4. The methodof claim 3, wherein a first segment of the plurality of segments isformed from a first adhesive material having a coefficient of thermalconductivity different than a second adhesive material comprising asecond segment.
 5. The method of claim 3, wherein, wherein a firstsegment comprised of the plurality of segments has an adhesive materialstrength different than a second segment.
 6. The method of claim 1,wherein the adhesive layer has a thermal conductivity greater than about0.3 W/mK.
 7. The method of claim 1, wherein the first substrate is anelectrostatic puck or gas distribution plate.
 8. A method ofrefurbishing an assembly having two substrates joined together by anadhesive layer, wherein at least one side of the adhesive layer bounds achannel that laterally extends between the substrates to an exterior ofthe assembly, the method comprising: introducing a bond weakening agentto an interior region of the adhesive layer through the channel;separating the substrates; refurbishing the first substrate; and forminga refurbished assembly using the refurbished first substrate.
 9. Themethod of claim 8, wherein forming the refurbished assembly furthercomprises joining the refurbished first substrate to one of arefurbished second substrate or a new second substrate.
 10. The methodof claim 8, further comprising: circumscribing the adhesive layer with aseal ring.
 11. The method of claim 8, wherein the adhesive layer has athermal conductivity greater than about 0.3 W/mK.
 12. The method ofclaim 8, wherein forming the refurbished assembly further comprisesallowing a new adhesive layer joining the refurbished first substrate toone of a refurbished second substrate or a new second substrate to ventthough the channel having one side bounded by the adhesive layer andextending between the substrates to an exterior of the refurbishedassembly.
 13. The method of claim 12, further comprising: forming aplurality of segments in the adhesive layer with a channel definedtherein the adhesive layer.
 14. The method of claim 13, wherein formingthe plurality of segments comprises: forming a first segment with afirst adhesive material having a coefficient of thermal conductivitydifferent than a second adhesive material comprising a second segment.15. The method of claim 13, wherein forming the plurality of segmentscomprises: forming a first segment with a first adhesive material havinga strength different than a second adhesive material comprising a secondsegment.
 16. The method of claim 13, wherein forming the plurality ofsegments comprises: fabricating at least two segments of the pluralityof segments from different adhesive materials.
 17. The method of claim8, further comprising: forming the adhesive layer from one or more ofacrylic-based adhesives, neoprene-based adhesives, silicone adhesives,epoxies, PSA (Pressure Sensitive Adhesives), thermoplastic adhesives,and thermoset adhesives.
 18. The method of claim 8, wherein the adhesivelayer has a lap shear adhesion of at least 40 pounds per square inch(PSI) and a tensile strength of 40 PSI at 25 degrees Celsius.